论文部分内容阅读
用光学全息方法在涂有光刻胶的多层膜表面上形成布拉格－菲涅耳元件所需的波带片图形，通过离子束刻蚀方法将波带片图形转写到多层膜上，完成元件的制作，给出布拉格－菲涅耳光学元件测量结果。测量结果表明上述方法适于制作布拉格－菲涅耳元件。
Optical holographic method is used to form the zone plate pattern of the Bragg-Fresnel element on the surface of the multi-layer film coated with photoresist. The zone plate pattern is transferred to the multi-layer film by the ion beam etching method to complete the element The production of the Bragg-Fresnel optical element measurement is given. The measurement results show that the above method is suitable for making Bragg-Fresnel elements.