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本文介绍了大电流密度钪酸盐阴极的制造工艺。采取共沉淀法,解决了关键工艺—S_(c2)O_3溶于酸的问题。此工艺制备简便、稳定、性能良好。直流发射1000℃大于10安/厘米~2;直流温度补偿数据900℃大于10安/厘米~2;脉冲发射在 f=100周/秒,τ=50微秒时,1000℃大于48.5安/厘米~2,二次发射σ=3.5,活性物质蒸发1000℃时1.2×10~(-10)克/厘米~2秒。
This article describes the manufacturing process for high current density scandate cathodes. Coprecipitation method to solve the key process -S_ (c2) O_3 acid problem. This process is simple, stable, good performance. DC 1000 ° C is greater than 10 A / cm 2; DC temperature compensation data 900 ° C is greater than 10 A / cm 2; pulse emission is greater than 48.5 A / cm at 1000 ° C for pulse = f = 100 w / ~ 2, secondary emission σ = 3.5, 1.2 × 10 ~ (-10) g / cm ~ 2 seconds when the active material is evaporated at 1000 ℃.