多腔诱导透射滤光片制备后出现的缺陷,严重地影响了薄膜样品的品质以及环境稳定性。实验用热蒸发的方法在室温浮法玻璃基底上制备了四腔诱导透射滤光片。用光学显微镜观测了缺陷的形貌,将缺陷分为不同类型的点状缺陷和线状缺陷,并结合光学轮廓仪和电子能量散射谱仪分析了缺陷的深度以及元素成份。分析结果显示,基片污染、喷溅以及应力、亚表面缺陷等综合因素是诱发缺陷产生的主要原因。为减少缺陷数量以及其尺寸和深度,实验验证了基底酸洗工艺对缺陷的抑制效果,证明了酸洗工艺具有可行性。最后结合缺陷产生的可能原因提出了制备工艺改进措施,已经取得了较好的成果。 The defects that occur after the preparation of the multi-cavity induced transmission filter seriously affect the quality of the film sample and the environmental stability. Experimental Four-chamber induced transmission filters were prepared by thermal evaporation at room temperature on a float glass substrate. The morphology of the defects was observed with an optical microscope, and the defects were divided into different types of spot defects and linear defects. The depth and elemental composition of the defects were analyzed by optical profilometer and electron energy dispersive spectrometer. The analysis shows that substrate contamination, splashes and stress, subsurface defects and other factors are the main reasons for the induced defects. In order to reduce the number of defects and their size and depth, the inhibitory effect of substrate pickling on defects was experimentally proved, and the pickling process was proved to be feasible. In the end, the improvement measures of the preparation process are put forward according to the possible causes of the defects, and good results have been achieved.