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提出了一种基于频域光学相干层析成像(SDOCT)技术的非破坏性玻璃亚表面缺陷(SSDs)定量检测新方法,描述了所搭建SDOCT系统的成像原理和特性,给出了所重建的玻璃SSDs二维和三维图像。利用所获得的图像,可以定量获得玻璃SSDs的深度、尺寸和形状。该研究结果对光学零件的加工和应用具有重要意义。
A new method for quantitative detection of non-destructive glass subsurface defects (SSDs) based on optical coherent tomography (SDOCT) in frequency domain was proposed. The imaging principle and characteristics of the constructed SDOCT system were described. The reconstructed Glass SSDs 2D and 3D images. Using the obtained images, the depth, size and shape of the glass SSDs can be quantitatively obtained. The results of this study are of great importance to the processing and application of optical components.