论文部分内容阅读
利用聚焦离子束刻蚀的方法在SOI(silicon oninsulator)基片上制备了W3型二维光子晶体直波导.观察并测量了近红外激光通过光子晶体波导的散射图形和透过谱.实验结果说明,激光在有引入引出脊形波导的光子晶体直波导中具有很好的传输特性.
A three-dimensional (3D) two-dimensional photonic crystal waveguide was fabricated on a silicon on insulator (SOI) substrate by focused ion beam lithography. The scattering pattern and transmission spectrum of the near infrared laser beam through the photonic crystal waveguide were observed and measured. The laser has good transmission properties in the photonic crystal waveguide with the introduction of the ridge waveguide.