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本文回顾了多弧——磁控溅射多功能离子镀膜设备的结构和功能 ,并且对该设备在氮化钛掺金离子镀 (IPG)方面的典型应用 ,做了较为详细的膜层性能分析。同时 ,本文又对近年来一种新型的多功能离子镀设备——复合式离子镀膜设备的结构及特点做了介绍 ,给出了该类型设备的典型应用场合 ,并且向读者介绍了使用该设备镀制的金属 /金属陶瓷多层膜的优异性能。
This article reviews the structure and function of multi-arc-magnetron sputter multifunctional ion plating equipment, and makes a detailed analysis of the performance of the equipment in the typical application of titanium nitride doped gold ion plating (IPG) . At the same time, this article also introduced a new type of multifunctional ion plating equipment in recent years - composite ion plating equipment, the structure and characteristics are introduced, given the typical application of this type of equipment, and introduced to the reader the use of the device Plating of metal / metal-ceramic multilayer film excellent performance.