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研究了一种由长光栅演变而来的新型圆光栅副存在运动偏心时的正常工作条件和由运动偏心所造成测量误差的补偿方法。阐述了该圆光栅的组成结构和工作原理;推导了其莫尔条纹曲线的表达式;着重研究了运动偏心对圆光栅测量影响的分析方法,即莫尔条纹随运动偏心变化的定量分析方法;推导了由于偏心引起的测量误差的补偿公式;通过实例分析证明,对精密测量圆光栅进行偏心误差补偿是十分必要的。研究结果表明,偏心较小时,由于不影响系统正常工作,因此会掩盖这种误差的存在,通过理论分析及补偿可确保这种新型圆光栅的测量精度。
A new type of circular grating developed from a long grating has been studied for its normal working conditions and the measurement error compensation method due to the eccentricity of motion. The composition and working principle of the circular grating are expounded. The expression of Moiré fringe curve is deduced. The analysis method of the effect of motion eccentricity on the measurement of circular grating is emphatically studied, that is, the quantitative analysis of moiré fringes with eccentricity of movement, The compensation formula of measurement error caused by eccentricity is deduced. It is proved by examples that it is necessary to compensate eccentric error of precision measuring circular grating. The results show that when the eccentricity is small, the existence of such errors will be covered because the system does not affect the normal operation. By theoretical analysis and compensation, the measurement accuracy of the new circular grating can be ensured.