设计了一种新颖的混合双肋型表面等离子体波导结构,基于有限元法对该波导在工作波长为1550nm下的传输特性进行了数值仿真和优化分析。研究了该结构的电场分布、传输损耗、归一化模场面积、品质因子和增益系数。结果表明,通过最优参数设计,有效模场面积可达1.5×10~(-4)λ~2,品质因子为135,增益系数为1286cm~(-1),且此时具有较小的损耗。与矩形金属脊混合波导结构相比,所设计的结构具有更强的光场限制能力,可以获得更好的波导传输效果。所设计的波导结构是未来解决光电技术高速化、小型化、集成化的一个重要途径。 A novel hybrid double-ribbed surface plasmon waveguide structure was designed. Based on the finite element method, the transmission characteristics of the waveguide at 1550 nm wavelength were numerically simulated and optimized. The structure of the electric field distribution, transmission loss, normalized mode field area, quality factor and gain factor were studied. The results show that the effective mode field can reach 1.5 × 10 ~ (-4) λ ~ 2, the quality factor is 135, the gain coefficient is 1286cm -1 by the optimal parameter design, and the loss is small . Compared with the rectangular metal ridge hybrid waveguide structure, the designed structure has a stronger optical field limiting ability, and can obtain better waveguide transmission effect. The designed waveguide structure is an important way to solve the problems of high speed, miniaturization and integration of optoelectronic technology in the future.