报道了采用十八酸作为质子源制作的铌酸锂光波导的性能及其退火对波导性能的影响，给出了退火前后波导层中非常光有效折射率的剖面分布，得出了质子交换的扩散参数和波导层的表面非常光折射率的增量．给出了波导层的表面非常光折射率的增量和扩散深度的增量与退火时间的指数关系． The performance of lithium niobate optical waveguide fabricated by using octadecanoic acid as proton source and the effect of annealing on the waveguide performance are reported. The profile of the extraordinary refractive index profile in the waveguide layer before and after annealing is given. The proton exchange Diffusion parameters and increments of the extraordinary refractive index of the surface of the waveguide layer. The exponential relationship between the increment of the extraordinary refractive index of the waveguide layer and the increment of the diffusion depth and the annealing time is given.