研究了光斑重叠率对飞秒激光硅材料表面着色的影响。实验结果表明:飞秒激光在硅材料表面着色是由于在其表面诱导出了周期纳米条纹结构;在飞秒激光功率一定的情况下,较高和较低的光斑重叠率都不能实现着色;在选定激光功率范围内,光斑重叠率越大,呈现的颜色越丰富,着色效率越高。另外反射率的测量结果表明着色后样品在可见光范围内反射率下降了50%左右。得到了飞秒激光硅材料表面着色的参数窗口,为飞秒激光半导体着色的推广提供了技术参考。 The effect of spot overlap on the surface coloration of femtosecond laser silicon materials was studied. The experimental results show that the femtosecond laser is colored on the surface of silicon by inducing periodic nanostructures on the surface of the nanostructures. When the femtosecond laser power is constant, the higher and lower spot overlap rate can not be achieved. At Within the selected laser power range, the greater the spot overlap rate, the more abundant the color presented and the higher the coloring efficiency. In addition, the measurement of reflectance shows that the reflectance of the sample in the visible range decreases by about 50% after the coloring. The parameter window of the surface coloring of the femtosecond laser silicon material is obtained, which provides a technical reference for the promotion of the femtosecond laser semiconductor coloration.