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通过对波长808nm的GaAIAs／GaAs半导体功率放大激光器端面镀ZrO2减反射膜工艺过程,从理论和实验上分析了涂层特性,透射率由无膜时的69％和32．6％提高到镀膜后的90％和80％以上,提高器件的耦合效率、输出光功率和工作寿命。
Through the process of coating ZrO2 antireflection coating on GaAsAs / GaAs semiconductor laser power amplifier with wavelength of 808nm, the coating properties were analyzed theoretically and experimentally. The transmittance increased from 69% and 32.6% Of 90% and 80%, improve the device coupling efficiency, output optical power and working life.