光学微腔具有很高的品质因子和很小的模式体积,在光电子器件研究方面具有重要的应用价值。运用时域有限差分(FDTD)法和Padé近似频谱分析法模拟研究了耦合微盘及带输出波导的单微盘微腔由于空间对称性破坏导致的模式耦合现象;特别计算了耦合模式的场分布和品质因子,并由场分布得出不同角量子数模式的能量比例。对耦合微盘,模式耦合引入的高阶模分量会使耦合模的品质因子大大降低。对半径1μm、折射率3.2的单个微盘,当它连接0.2μm宽度的输出波导时,模式波长相差6.6nm的TE9,1模和TE6,2模耦合形成波长1.52μm的耦合模式,其模式Q值为268,模式具有三角形场分布。 Optical microcavity has high quality factor and small mode volume, and has important application value in optoelectronic device research. The mode coupling phenomenon due to the destruction of the spatial symmetry of the coupled microchannels and the output of the microchannels with output waveguides has been studied by FDTD method and Padé approximate spectral analysis method. The field distribution and the quality of coupled modes have been calculated in particular. Factor, and the energy distribution of different angular quantum number model derived from the energy ratio. For coupled microdisks, the high-order mode components introduced by mode coupling will greatly reduce the quality factor of coupled modes. For a single microdisk with a radius of 1 μm and a refractive index of 3.2, when it is connected with an output waveguide with a width of 0.2 μm, TE9,1 mode and TE6,2 mode with a mode-difference of 6.6 nm are coupled to form a coupling mode with a wavelength of 1.52 μm. The mode Q Is 268, the pattern has a triangular field distribution.