为了对微纳加工工件进行三维形貌测量,建立了基于数字微镜的并行激光共焦显微检测系统。首先,利用衍射光学对数字微镜的夫琅禾费衍射模型进行了研究。接着,利用数字微镜实现扫描像素单元为2×2,周期为T=3的并行扫描模式。然后对三维图像重构算法和激光散斑匀化进行了分析。最后,利用该系统分别对镀膜平板、WSZ位置灵敏阳极探测器以及螺钉进行了三维测量。实验结果表明,在轴向平移台步距为10nm的条件下,该系统能准确重构出样品三维形貌。该共焦显微检测方法能大大提高共焦扫描速度,能很好地满足一般工业检测需求,本文为并行共焦检测技术提供了一条新的研究和应用方法。 In order to measure the three-dimensional topography of the micro-nano machined workpiece, a parallel laser confocal microscopic detection system based on digital micro-mirror was established. Firstly, the Fraunhofer diffraction model of digital micromirror was studied by using diffractive optics. Next, the digital micromirror is used to realize the parallel scan mode of scanning pixel unit 2 × 2 and period T = 3. Then three-dimensional image reconstruction algorithm and laser speckle homogenization were analyzed. Finally, three-dimensional measurements of the coated flat panel, the WSZ position-sensitive anode detector, and the screw were performed using the system. The experimental results show that the system can accurately reconstruct the three-dimensional morphology of the sample under the condition that the axial translation stage pitch is 10nm. The confocal microscopy method can greatly improve the confocal scanning speed, can well meet the needs of general industrial testing, this paper provides a new research and application methods for parallel confocal detection technology.