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由于高新技术的迅速发展,微型机械包括各种微传感器、微执行器和微控制器的研究和为一些尖端技术发展过程中的重要手段越来越受到国际科技界的重视。微型机械多种多样。如可在狭小的空间和危险场所进行维护检查的自行式微型机械、可进入管道、人体腔体甚至血管进行检查和手术的微型机械、扫描隧道显微镜(STM)和原子力显微镜上的分辨力以纳米计的微动机构、半导体领域和分子机械领域都出现了很精密的微型机械。国外为了提高微型机械的研究水平,最近还定期举办微型机构和微型机器人的比赛,包括爬山、爬崖和自我表演等项目,由于微型机械都必须有所动作,因此其中的微执行器(microactuator)最为重要,其工作原理多种多样。本文将就微型机械、微执行器的原理和国外的微型机构比赛作一综述。
Due to the rapid development of new and high technology, micromechanics, including the research of various micro-sensors, micro-actuators and microcontrollers, and more and more important means for the development of some cutting-edge technologies have drawn more and more attention from the international science and technology circles. A variety of micro-machinery. Such as self-propelled micromachines for maintenance and inspection in confined spaces and dangerous places, micromachines that can be used for inspection and surgery in pipes, human cavities and even blood vessels, and resolution on scanning tunneling microscope (STM) and atomic force microscopes in nanometers Micro-movement institutions, the field of semiconductors and molecular machinery have emerged very sophisticated micro-machinery. Foreign In order to improve the level of research on micro-mechanics, micro-mechanics and micro-robot competitions have also been held recently, including such items as mountain climbing, cliff climbing and self-performance. Since the micro-machines must act, microactuators, The most important, its working principle is varied. This article will review the principles of micromachines, microactuators and foreign micro-agency competitions.