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本文主要是论述多层减反射膜的设计方法、制造与应用效果。在膜系设计中既要考虑减反效果又要考虑工艺简便,故采用四分之一波长整数倍膜系。膜系层数尽量少(三层到六层),就能使折射率从1.48至1.755的各种光学镜头的一个表面反射损失从3.75％—7.53％降低到0.35％以下。减反射光谱带宽可达到整个可见光谱区或从近紫外到近红外光谱区。因此这种膜系不仅对可见光谱区具有很好的使用价值,而且对各种倍频激光中消除杂光的干扰效果也非常显著。在设计中也考虑到恶劣环境中的使用,选用高熔点的氧化物与氟化物膜料。故膜层机械强度、化学稳定性与光学性能非常好。由于膜系设计考虑周到、镀制成品率很高、已经成批生产。在变形宽银幕放映机、电影洗片、照相复印机、高精度光刻机等光学系统中使用,证明效果非常显著。
This article mainly discusses the design method, manufacture and application effect of multilayer anti-reflection film. In the design of the membrane system, it is necessary to consider the anti-retrogradation effect as well as to consider the process is simple, so the use of quarter-wavelength integer multiplication film system. Minimizing the number of layers in the film (three to six layers) allows one surface reflection loss of various optical lenses with refractive indices from 1.48 to 1.755 to be reduced from 3.75% to 7.53% to 0.35% or less. Anti-reflection spectral bandwidth can reach the entire visible spectrum or near-ultraviolet to near-infrared spectral region. Therefore, this film system not only has good value in the visible spectrum, but also has a remarkable effect on eliminating stray light in various frequency doubling lasers. In the design also considered the use of harsh environments, the choice of high melting point oxide and fluoride film material. Therefore, the mechanical strength of the film, chemical stability and optical properties are very good. Due to thoughtful design of the membrane system, the plating rate of finished products is very high and has been mass-produced. In the deformation of widescreen projectors, film washes, photographic copiers, high-precision lithography and other optical systems used to prove the effect is very significant.