MT-TiCN/α-Al2O3多层涂层是高性能硬质合金CVD涂层刀具的典型涂层结构,得到广泛的应用和研究。TiAlCNO过渡层可以改善MT-TiCN/α-Al2O3涂层之间的结合性能。通过改变沉积气氛氧化势,制备了不同成分的TiAlCNO过渡层和MT-TiCN/TiAlCNO/Al2O3多层涂层,研究了沉积气氛氧化势对TiAlCNO过渡层和MT-TiCN/TiAlCNO/Al2O3多层涂层的结构性能的影响。结果表明:当沉积气氛中有CO2时,沉积TiAlCNO过渡层中可以检测到α-Al2O3相;随沉积气氛中CO2的增加,TiAlCNO过渡层中的Al含量增加,沉积在TiAlCNO过渡层表面的α-Al2O3涂层织构降低,结合强度增加。当TiAlCNO过渡层沉积气氛中CO2流量由0 L/min增加到1 L/min时,Al2O3涂层的织构系数TC(113)由0.64增加到1.33,而TC(012)由2.07降到1.5,TC(110)由1.99降到0.97;划痕临界载荷LC由36.5 N增加到51.7 N。 MT-TiCN / α-Al2O3 multilayer coating is a typical coating structure of high performance carbide CVD coating tool, which has been widely used and studied. The TiAlCNO interlayers improve the bonding between the MT-TiCN / α-Al2O3 coatings. The TiAlCNO interlayers and MT-TiCN / TiAlCNO / Al2O3 multilayers with different compositions were prepared by changing the oxidation potential in the depositional atmosphere. The influence of the oxidation potential of the depositional atmosphere on the TiAlCNO interlayers and the MT-TiCN / TiAlCNO / Al2O3 multilayers The structural performance of the impact. The results show that the α-Al2O3 phase can be detected in the deposited TiAlCNO transitional layer when there is CO2 in the depositional atmosphere. The content of Al in the TiAlCNO transitional layer increases with the increase of CO2 in the depositional atmosphere, The texture of Al2O3 coating decreases and the bonding strength increases. The texture coefficient TC (113) of Al2O3 coating increased from 0.64 to 1.33 and TC (012) decreased from 2.07 to 1.5 when the flow of CO2 in the deposition atmosphere of TiAlCNO increased from 0 L / min to 1 L / min. The TC (110) decreased from 1.99 to 0.97. The critical load LC increased from 36.5 N to 51.7 N.