利用Q-开关Nd:YAG激光器产生的1.06μm、140ns的脉冲激光聚焦在空气中的石英靶上,采集激光诱导的石英等离子体发射光谱,在室温大气压下利用高速摄影机对激光加工过程中伴随产生的等离子体的动态过程进行监测研究;在局部热力学平衡条件(LET)近似下,估算了等离子体电子平均温度随时间的变化规律;提出室温下等离子体加工石英微通道过程中等离子体性质发生变化的特征时间为1000μs和400μs;影响等离子体加工质量的关键因素可能包括通道内部气压值。 A 1.06μm and 140ns pulse laser generated by a Q-switched Nd: YAG laser was focused on the quartz target in the air to collect the laser-induced quartz plasma emission spectra. The high-speed camera at room temperature was used to simulate the laser processing process, (LET) approximation, the variation law of the average temperature of the plasma electron with time is estimated, and the change of plasma properties during plasma processing of the quartz microchannel at room temperature is proposed The characteristic times are 1000μs and 400μs; the key factors affecting plasma processing quality may include the channel internal pressure values.