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本文引入单体MAGME合成了具有自交联作用的MAGME、苯乙烯和N ( 4 羟基苯基 )马来酰亚胺的共聚物 ,并以该聚合物为基体树脂 ,研制了一种新型的水显影化学增幅型负性抗蚀剂 ,并初步研究了其光刻工艺条件 .
In this paper, the monomer MAGME was used to synthesize a copolymer of MAGME, styrene and N (4-hydroxyphenyl) maleimide with self-crosslinking. Using this polymer as the matrix resin, a novel water The chemically amplified negative resist is developed and its lithographic process conditions are preliminary studied.