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采用紫外光助溶胶-凝胶法在玻璃基底上制备了掺铝氧化锌薄膜。研究了厚度对薄膜性质的影响,结果表明:所有薄膜均由具有c轴优先生长取向的六角纤锌矿结构的ZnO晶体构成,晶体的粒径随厚度的增加而先增大,达到最大值后,不再随厚度的增加而改变;薄膜的方阻随厚度的增加先减小,在达到最小值2.1×102Ω/□后,随厚度的增加又略有增大;而所有薄膜均是透明的,在可见光区的透光率>80%。
Aluminum-doped zinc oxide thin films were prepared on glass substrates by UV-assisted sol-gel method. The effects of thickness on the properties of the films were investigated. The results show that all the films consist of ZnO crystals with a hexagonal wurtzite structure with c-axis preferred orientation. The crystal size increases first with the increase of the thickness. After reaching the maximum, , No longer changes with the increase of the thickness; the square resistance of the film first decreases with the increase of the thickness, but increases slightly with the increase of the thickness after reaching the minimum value of 2.1 × 10 2 Ω / □; while all the films are transparent , In the visible light transmittance> 80%.