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为实现小型化、非接触式、快速高精度的位移测量,设计并搭建了基于光学彩色共焦原理的位移测量系统。系统中数据拟合采用的方法是,对光谱响应函数极值周围的数据进行高斯叠加拟合,以获得光谱响应曲线的峰值,从而得到峰值所对应的波长。经过实验验证,系统的测量范围为2mm,测量精度可以达到10μm,线性度为3.4%,光谱响应的半高宽(FWHM)为49nm。因此能够满足一定精度的位移测量需求。
In order to realize the miniaturized, non-contact, fast and accurate displacement measurement, a displacement measurement system based on optical color confocal principle was designed and built. The data fitting method used in the system is to perform Gaussian overlay fitting on the data around the extremum of the spectral response function to obtain the peak value of the spectral response curve so as to obtain the peak value corresponding to the wavelength. The experimental verification shows that the system has a measuring range of 2mm, a measurement accuracy of 10μm, a linearity of 3.4% and a full-width-half-width (FWHM) of 49nm. Therefore, to meet a certain degree of precision displacement measurement needs.