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Modeling of photolithography process in semiconductor wafer fabrication systems using extended hybri
[期刊论文] 作者：ZHOU Bing-hai,PAN Qing-zhi,WAN,
来源：中南工业大学学报 年份：2004
To describe a semiconductor wafer fabrication flow availably, a new modeling method of extended hybrid Petri nets(EHPNs) was proposed. To model the discrete par...
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