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为优化梳齿式微硅加速度计的系统设计,研究了激励电压对加速度计性能和电路参数选择的影响。推导出的系统静电力方程说明,激励电压对静电力的影响相当于在预载电压上叠加了微幅高频干扰,该干扰决定了加速度计的标度因数稳定性。由闭环传递函数得出了标度因数稳定性与电路参数间的关系。实验结果表明,根据标度因数稳定性指标选取了合适的电路参数后,可以忽略激励电压对静电力的影响。在实际应用中,利用该结论可以减小加速度计尺寸并降低功耗。
In order to optimize the system design of comb-tooth micro-silicon accelerometer, the influence of excitation voltage on accelerometer performance and circuit parameter selection was studied. The deduced electrostatic force equation of the system shows that the influence of excitation voltage on the electrostatic force is equivalent to the superimposition of the small-amplitude high-frequency interference on the pre-load voltage, which determines the stability of the scale factor of the accelerometer. The relationship between the stability of the scale factor and the circuit parameters is derived from the closed-loop transfer function. The experimental results show that the influence of excitation voltage on the electrostatic force can be ignored after the appropriate circuit parameters are selected according to the stability index of scale factor. In practical applications, this conclusion can be used to reduce the size of the accelerometer and reduce power consumption.