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在多晶硅制绒中,通过调整HNO_3、HF和水或醋酸的比例可以很好地控制制绒的过程并得到理想的绒面。但是在腐蚀过程中随着HNO_3、HF和硅的消耗会产生大量的副产品(如H_2SiF_6,HNO_2、N_2O_3等),该文通过在反应腐蚀液中预溶解一些硅的方法研究了反应副产品对制绒特性的影响。发现随着预溶硅的增加,在富HNO_3溶液中反应速度出现了先上升后下降的趋势,而在富HF的溶液中反应速度出现了线性下降。最后,针对反应副产物亚硝酸对制绒特性的影响进行了分析。
In polysilicon texturing, the process of texturing can be well controlled by adjusting the ratio of HNO 3, HF, and water or acetic acid, and the desired texturized surface can be obtained. However, with the consumption of HNO 3, HF and silicon, a large number of by-products (such as H 2 SiF 6, HNO 2, N 2 O 3, etc.) are generated during the etching process. The reaction by- Effect of characteristics. It is found that with the increase of the pre-soluble silicon, the reaction rate in the HNO 3 -rich solution firstly increases and then decreases, whereas in the HF-rich solution the reaction rate decreases linearly. Finally, the influence of nitrous acid, a by-product of the reaction, on texturing properties was analyzed.