蒸汽输运法是制备高质量且大面积均匀的Cd Te薄膜的一种优良的方法。采用自主研发的一套蒸汽输运沉积系统制备了Cd Te多晶薄膜,并研究了衬底温度对Cd Te薄膜性质及太阳电池性能的影响。利用XRD、SEM、UV-Vis和Hall等测试手段研究了衬底温度对薄膜的结构、光学性质和电学性质的影响。结果表明,蒸汽输运法制备的Cd Te薄膜具有立方相结构,且沿(111)方向高度择优。随着衬底温度的升高(520℃~640℃),Cd Te薄膜的平均晶粒尺寸从2?m增大到约6?m,Cd Te薄膜的载流子浓度也从1.93×1010 cm–3提高到2.36×1013 cm–3,说明提高衬底温度能够降低Cd Te薄膜的缺陷复合,使薄膜的p型更强。实验进一步研究了衬底温度对Cd Te薄膜太阳电池性能的影响,结果表明适当提高衬底温度,能够大幅度提高电池的效率、开路电压和填充因子,但是过高的衬底温度又会降低电池的长波光谱响应,导致电池转换效率的下降。经过参数优化,在衬底温度为610℃、无背接触层小面积Cd Te薄膜太阳电池的转换效率达到11.2%。 Steam transport method is a good method to prepare high quality and large area uniform CdTe film. Cd Te films were prepared by a steam transport system developed by ourselves. The effects of substrate temperature on the properties of CdTe thin films and solar cell performance were also studied. The effects of substrate temperature on the structure, optical properties and electrical properties of the films were investigated by XRD, SEM, UV-Vis and Hall measurements. The results show that the CdTe films prepared by steam transport have a cubic phase structure and are highly preferred along the (111) direction. With the increase of substrate temperature (520 ℃ ~ 640 ℃), the average grain size of CdTe thin films increases from 2μm to 6μm, and the carrier concentration of CdTe thin films increases from 1.93 × 1010 cm -3 to 2.36 × 1013 cm-3, indicating that increasing the substrate temperature can reduce the defect recombination of the CdTe thin film and make the p-type thin film stronger. The effect of substrate temperature on the performance of CdTe thin-film solar cells was further studied. The results show that the appropriate substrate temperature can greatly improve the cell efficiency, open circuit voltage and fill factor, but the substrate temperature is too high will reduce the battery The long-wave spectral response, resulting in a decline in battery conversion efficiency. After the parameter optimization, the conversion efficiency of small area CdTe thin film solar cell without back contact reaches 11.2% at the substrate temperature of 610 ℃.