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在实际测量中.由于光斑具有一定尺寸和不对称性,在很大程度上影响了位置敏感探测器(PSD)的定位精度。根据激光光束高斯能连续分布的特征,建立了一种三线PSD定位模型,可以根据光斑的形状解算出该光斑特征状态下的定位误差。实验验证了该PSD定位模型的有效性。在激光三角测量法中采用该定位模型可以很好地补偿由于光斑自身不均匀性、传输过程中光斑尺寸变化以及激光与待测物体互作用产生的散斑所引入的定位误差,有效提高测量精度。实验中可以补偿的误差达到0.07 mm。
In actual measurement, positioning accuracy of PSD (Position Sensitive Detector) is largely affected by the size and asymmetry of the spot. According to the feature that the Gaussian distribution of the laser beam can be continuously distributed, a three-line PSD positioning model is established, and the positioning error of the spot can be calculated according to the shape of the spot. The validity of this PSD localization model is verified experimentally. In the laser triangulation method, this positioning model can well compensate for the position error introduced by speckle caused by the spot’s own nonuniformity, the change of the spot size during the transmission and the interaction between the laser and the object to be measured, which can effectively improve the measurement accuracy . The experiment can compensate for the error of 0.07 mm.